Atom Probe Tomography Core Facility

This core facility captures mass spectral data obtained through time-of-flight measurements that can be used for 3D nanoscale compositional analysis to identify light mass and heavy mass species with equivalent sensitivity.

INSTRUMENT DETAILS

The LEAP 4000X Si local electrode atom probe provides 3D nanoscale compositional analysis.  Mass spectral data obtained through time-of-flight measurements can be used to identify light mass and heavy mass species (hydrogen out to >1000 Da) with equivalent sensitivity.  The mass resolution is sufficient for distinguishing isotopic abundances.  The instrument features both laser pulsing and voltage pulsing along with a 90 mm to 160 mm variable flight path.

• Mass resolution (FWHM)* : Voltage Pulse Mode 1:1500 ; Laser Pulse Mode 1:500
• Mass resolution (FWTM)*: Voltage Pulse Mode 1:180 ; Laser Pulse Mode 1:650
• Mass resolution (FW1%M)*: Voltage Pulse Mode n/a ; Laser Pulse Mode 1:400
• Maximum pulse rate (kHx): Voltage Pulse Mode 200 ; Laser Pulse Mode 1,000
• Base pressure on 50K specimen (Torr) : <1E – 10
• Minimum specimen temperature (K) : 25
• Achievable field of view (nm) : 250
• Lateral resolution (nm): 0.2
• Depth resolution (nm): 0.05
• IVAS advanced data analysis software for reconstruction, visualization and analysis of atom probe data sets
• Plasma cleaner interfaced to load lock provides surface contamination removal

*For standard AI specimen